Vacuum Technology
Description
Frequently Asked Questions
Mechanical Engineering Technology; Electrical Engineering Technology; Semiconductor Manufacturing
Mechanical Engineering Technology; Electrical Engineering Technology; Semiconductor Manufacturing.
All levels of undergraduate students.
Engineering or Engineering Technology and related STEM backgrounds.
All modules utilize a hands-on lab format compatible with a conventional undergraduate laboratory.
Learning Objectives
Technical and Information Literacy – Students will read, analyze, and utilize technical documents such as spreadsheets, parts checklists, basic vacuum system assembly schematics, testing and assembly procedures, and basic data documentation and analysis procedures.
Critical Thinking/Systems Level Troubleshooting – Students will be applying basic troubleshooting techniques to various vacuum system components including both real leaks virtual leaks. Students will also learn to utilize a He leak detector to aid in system troubleshooting.
Working Collaboratively – Students will interact in groups to work on assembly, testing, and troubleshooting tasks in a non-competitive environment.
Learning Outcomes
Students will demonstrate knowledge of the fundamentals of vacuum and pressure, pressure measurement, vacuum technology components, and vacuum system configurations.
Students will demonstrate familiarity with the vacuum generation, measurement and gas flow utilized in modern manufacturing based on hands-on assembly and testing of a basic vacuum system.
Students will demonstrate competency in basic vacuum system operation and troubleshooting including identification of operational issues, acquisition of operational data, and formulation of possible solutions.
Students will demonstrate competency in advanced vacuum system operation, troubleshooting, and leak detection including identification of operational issues, usage of leak-check protocols, and utilization of He-leak detector technology.
Required Tools and Equipment
These modules utilize custom designed and assembled training systems comprised of commercially available vacuum components compatible with standard vacuum pumps and gauges. Each activity lists parts used.
Hands-on Activities
Video Vacuum Volume 1: The Phantom Menace
This interactive presentation is approximately 12 minutes long and introduces vacuum system concepts.
Basic Vacuum System Principles
This introductory lecture details a vacuum system concepts and illustrates its construction with necessary components.
Basic Vacuum System Principles Intro
Basic Vacuum Technology Training System Module
This module is comprised of a series of ‘hands-on’ activities suitable for a performance-learning based approach (or a project-based curriculum with additional content). It is comprised of a custom-designed basic vacuum training module including a vacuum manifold, chamber (bell jar) and a Pirani vacuum gauge. Schematic and parts lists are included. The system is expandable to include plasma generation inside chamber (see separate NEATEC content download for this operation mode). Three basic lab activities are included for module: System Assembly, System Pumpdown, and Leak Rate Measurement. For data acquisition a LabQuest data logger system is used which utilized the Pirani gauge. Representative data are included. For the Leak Rate Measurement activity (for both real and virtual vacuum leaks) an example Excel spreadsheet is included to convert the measured pressure rise (typically mTorr/second) to a true leak rate (sccm or cc/s).
Exercise #1–Component Identification and System Assembly
Basics Vacuum Systems Training
Loading...
Reload document 
Open in new tab Vacuum Trainer Schematic
Loading...
Vacuum Trainer Parts Cost List
Loading...
Exercise #2–System Pumpdown and Characterization
Example of a Pumpdown Curve
Loading...
Exercise #3–Vacuum System Leaks (Real and Virtual) Measurements
Leak Rate Measurement of Basic Vacuum Training System
Loading...
Excel Conversion of Rate of ‘Rise to Leak’ Ratio
Loading...
Vacuum Fastener and Seals Component Trainer Module
This module is comprised of a series of ‘hands-on’ activities suitable for a performance-learning based approach (or a project-based curriculum with additional content). It is comprised of a custom-designed vacuum ‘fitting trainer’ – a vacuum chamber comprised entirely of commercial vacuum parts and seals typically encountered in low- and high-temperature processing equipment for the semiconductor and semiconductor-derivative manufacturing industry. It includes conventional o-ring seals, VCO-seals, VCR seals, Swagelok tube fitting seals, Cu-gasket conflats, and ASA multi-flange connectors. The system incorporates a conventional Pirani gauge and is utilized for He-leak detector testing. The following Activity folders include assembly and initial test lab descriptions. Although not included in the folders below, all the Pumpdown and Leak Rate Measurement activities described for the Basic Vacuum Training System above can be repeated with the Vacuum Fastener and Seals Component Trainer.
He Leak Detector Module
This module is currently under assembly and will be soon be updated. Currently, the activities use a Pfeiffer ASM340 2.5 L/S He Leak Detector (commercial He Leak Detector commonly used in industry) to illustrate principles, practice and techniques for vacuum system troubleshooting. The folder below includes two introduction PDF presentations utilized by staff from Pfeiffer Vacuum who have served as instructors for NEATEC vacuum technology training modules for 2-year, 4-year college students and incumbent semiconductor tool technicians.